Semiconductor Wafer Dry Etching Equipment Market, Global Outlook and Forecast 2025-2031

The global Semiconductor Wafer Dry Etching Equipment Market was valued at 18840 million in 2024 and is projected to reach US$ 31750 million by 2031, at a CAGR of 7.9% during the forecast period.

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Semiconductor Wafer Dry Etching Equipment Market Analysis:

The global Semiconductor Wafer Dry Etching Equipment Market was valued at 18840 million in 2024 and is projected to reach US$ 31750 million by 2031, at a CAGR of 7.9% during the forecast period.

Semiconductor Wafer Dry Etching Equipment Market Overview

Semiconductor wafer dry etching equipment is a type of manufacturing tool used in the semiconductor industry for the process of etching or removing material from the surface of semiconductor wafers. Etching is a critical step in semiconductor device fabrication, allowing precise patterning of features on the wafer surface. Dry etching, as opposed to wet etching, involves using plasma or reactive gases to chemically or physically remove material from the wafer surface.
According to our Semiconductor Research Center, in 2022, the global semiconductor equipment was valued at US$ 109 billion. China mainland, China Taiwan and South Korea have a combined market share over 70%. North America, Europe and Japan, have a combined market share of 23%. The key drivers are high performance computing, AI, cloud computing, Servers, 5G and EV (electric vehicle), etc.
We have surveyed the Semiconductor Wafer Dry Etching Equipment manufacturers, suppliers, distributors, and industry experts on this industry, involving the sales, revenue, demand, price change, product type, recent development and plan, industry trends, drivers, challenges, obstacles, and potential risks
This report aims to provide a comprehensive presentation of the global market for Semiconductor Wafer Dry Etching Equipment, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Semiconductor Wafer Dry Etching Equipment. This report contains market size and forecasts of Semiconductor Wafer Dry Etching Equipment in global, including the following market information:

  • Global Semiconductor Wafer Dry Etching Equipment market revenue, 2020-2025, 2026-2031, ($ millions)
  • Global Semiconductor Wafer Dry Etching Equipment market sales, 2020-2025, 2026-2031, (Units)
  • Global top five Semiconductor Wafer Dry Etching Equipment companies in 2024 (%)

Semiconductor Wafer Dry Etching Equipment Key Market Trends  :

  • Rise in AI and High-Performance Computing (HPC) Demand
    The growing adoption of AI, machine learning, and HPC applications is increasing the demand for advanced semiconductor wafers, boosting the dry etching equipment market.

  • Shift Towards 3D Semiconductor Architectures
    As chipmakers move toward 3D stacking and advanced packaging technologies, dry etching equipment is becoming essential for precise and high-aspect-ratio etching.

  • Expansion of 5G and IoT Technologies
    The proliferation of 5G networks and IoT devices is driving demand for high-performance semiconductor wafers, increasing the need for efficient dry etching solutions.

  • Growing Investment in Semiconductor Manufacturing
    Countries like China, the U.S., and South Korea are heavily investing in semiconductor manufacturing, fueling demand for wafer processing equipment, including dry etching tools.

  • Advancements in Plasma Etching Techniques
    New developments in plasma etching, such as Atomic Layer Etching (ALE), are enhancing precision, reducing damage, and improving efficiency in semiconductor fabrication.

Semiconductor Wafer Dry Etching Equipment Market Regional Analysis :

semi insight

  • North America:

    Strong demand driven by EVs, 5G infrastructure, and renewable energy, with the U.S. leading the market.

  • Europe:

    Growth fueled by automotive electrification, renewable energy, and strong regulatory support, with Germany as a key player.

  • Asia-Pacific:

    Dominates the market due to large-scale manufacturing in China and Japan, with growing demand from EVs, 5G, and semiconductors.

  • South America:

    Emerging market, driven by renewable energy and EV adoption, with Brazil leading growth.

  • Middle East & Africa:

    Gradual growth, mainly due to investments in renewable energy and EV infrastructure, with Saudi Arabia and UAE as key contributors.

Total Market by Segment:

Global Semiconductor Wafer Dry Etching Equipment market, by Type, 2020-2025, 2026-2031 ($ millions) & (Units)
Global Semiconductor Wafer Dry Etching Equipment market segment percentages, by Type, 2024 (%)

  • Inductively Coupled Plasma (ICP)
  • Capacitive Coupled Plasma (CCP)
  • Reactive Ion Etching (RIE)
  • Deep Reactive Ion Etching (DRIE)
  • Others

Global Semiconductor Wafer Dry Etching Equipment market, by Application, 2020-2025, 2026-2031 ($ Millions) & (Units)
Global Semiconductor Wafer Dry Etching Equipment market segment percentages, by Application, 2024 (%)

  • 300 mm Wafer
  • 200 mm Wafer
  • Others

Competitor Analysis
The report also provides analysis of leading market participants including:

  • Key companies Semiconductor Wafer Dry Etching Equipment revenues in global market, 2020-2025 (estimated), ($ millions)
  • Key companies Semiconductor Wafer Dry Etching Equipment revenues share in global market, 2024 (%)
  • Key companies Semiconductor Wafer Dry Etching Equipment sales in global market, 2020-2025 (estimated), (Units)
  • Key companies Semiconductor Wafer Dry Etching Equipment sales share in global market, 2024 (%)

Further, the report presents profiles of competitors in the market, key players include:

  • Lam Research
  • Tokyo Electron Limited
  • Applied Materials
  • Hitachi High-Tech
  • SEMES
  • AMEC
  • NAURA
  • SPTS Technologies (KLA)
  • Oxford Instruments
  • ULVAC
  • Plasma-Therm

Drivers:

  • Surge in AI and Cloud Computing Adoption
    The growing need for high-speed processing in AI, cloud computing, and data centers is propelling demand for advanced semiconductor wafers, boosting dry etching equipment sales.

  • Expanding EV and 5G Markets
    The rise of electric vehicles (EVs) and 5G infrastructure is increasing the demand for high-performance semiconductors, accelerating the need for advanced wafer etching processes.

  • Government Investments in Semiconductor Industry
    Governments worldwide are providing incentives and funding to strengthen domestic semiconductor manufacturing, increasing demand for wafer processing equipment.

Restraints:

  • High Initial Investment and Maintenance Costs
    The significant cost associated with semiconductor wafer dry etching equipment poses a challenge for small and mid-sized manufacturers.

  • Complexity of Advanced Etching Processes
    The growing complexity of semiconductor devices requires highly sophisticated etching processes, which can be costly and technologically demanding.

  • Supply Chain Disruptions
    Geopolitical tensions, trade restrictions, and semiconductor supply chain constraints impact the availability and pricing of etching equipment.

Opportunities:

  • Expansion of Foundries and Semiconductor Fabs
    The increasing establishment of new semiconductor fabrication plants globally presents growth opportunities for dry etching equipment providers.

  • Development of Next-Gen Etching Technologies
    Innovations in etching techniques, such as ALE and extreme ultraviolet (EUV) lithography integration, offer potential for improved efficiency and accuracy.

  • Rising Demand for Smaller and More Powerful Chips
    The push for miniaturization in electronics and advanced computing is driving demand for highly precise dry etching processes.

Challenges:

  • Intense Market Competition Among Key Players
    Leading semiconductor equipment manufacturers face tough competition, making it difficult for new entrants to establish a foothold.

  • Stringent Environmental Regulations
    Regulatory compliance regarding the use of chemicals and plasma etching gases adds complexity to the manufacturing process.

  • Technological Limitations in Etching Ultra-Fine Features
    As chip architectures become more intricate, achieving precision at nanoscale levels remains a significant challenge.

FAQs

Q: What are the key driving factors and opportunities in the Semiconductor Wafer Dry Etching Equipment market?
A: The primary drivers include the growth of AI, cloud computing, 5G, and EVs, along with government investments in semiconductor manufacturing. Opportunities lie in technological advancements like ALE and the expansion of semiconductor fabrication plants.

Q: Which region is projected to have the largest market share?
A: Asia-Pacific, led by China, Taiwan, and South Korea, is expected to dominate the market, accounting for over 70% of the global semiconductor equipment industry.

Q: Who are the top players in the global Semiconductor Wafer Dry Etching Equipment market?
A: Leading companies include Lam Research, Applied Materials, Tokyo Electron, Hitachi High-Tech, and ULVAC, among others.

Q: What are the latest technological advancements in the industry?
A: Developments in Atomic Layer Etching (ALE), deep reactive ion etching (DRIE), and improved plasma etching techniques are enhancing precision and efficiency in semiconductor fabrication.

Q: What is the current size of the global Semiconductor Wafer Dry Etching Equipment market?
A: The market was valued at $18.84 billion in 2024 and is projected to reach $31.75 billion by 2031, growing at a CAGR of 7.9% during the forecast period.

Semiconductor Wafer Dry Etching Equipment Market, Global Outlook and Forecast 2025-2031

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Table of Content

1 Introduction to Research & Analysis Reports
1.1 Semiconductor Wafer Dry Etching Equipment Market Definition
1.2 Market Segments
1.2.1 Segment by Type
1.2.2 Segment by Application
1.3 Global Semiconductor Wafer Dry Etching Equipment Market Overview
1.4 Features & Benefits of This Report
1.5 Methodology & Sources of Information
1.5.1 Research Methodology
1.5.2 Research Process
1.5.3 Base Year
1.5.4 Report Assumptions & Caveats
2 Global Semiconductor Wafer Dry Etching Equipment Overall Market Size
2.1 Global Semiconductor Wafer Dry Etching Equipment Market Size: 2024 VS 2031
2.2 Global Semiconductor Wafer Dry Etching Equipment Market Size, Prospects & Forecasts: 2020-2031
2.3 Global Semiconductor Wafer Dry Etching Equipment Sales: 2020-2031
3 Company Landscape
3.1 Top Semiconductor Wafer Dry Etching Equipment Players in Global Market
3.2 Top Global Semiconductor Wafer Dry Etching Equipment Companies Ranked by Revenue
3.3 Global Semiconductor Wafer Dry Etching Equipment Revenue by Companies
3.4 Global Semiconductor Wafer Dry Etching Equipment Sales by Companies
3.5 Global Semiconductor Wafer Dry Etching Equipment Price by Manufacturer (2020-2025)
3.6 Top 3 and Top 5 Semiconductor Wafer Dry Etching Equipment Companies in Global Market, by Revenue in 2024
3.7 Global Manufacturers Semiconductor Wafer Dry Etching Equipment Product Type
3.8 Tier 1, Tier 2, and Tier 3 Semiconductor Wafer Dry Etching Equipment Players in Global Market
3.8.1 List of Global Tier 1 Semiconductor Wafer Dry Etching Equipment Companies
3.8.2 List of Global Tier 2 and Tier 3 Semiconductor Wafer Dry Etching Equipment Companies
4 Sights by Product
4.1 Overview
4.1.1 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Market Size Markets, 2024 & 2031
4.1.2 Inductively Coupled Plasma (ICP)
4.1.3 Capacitive Coupled Plasma (CCP)
4.1.4 Reactive Ion Etching (RIE)
4.1.5 Deep Reactive Ion Etching (DRIE)
4.1.6 Others
4.2 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue & Forecasts
4.2.1 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2025
4.2.2 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue, 2026-2031
4.2.3 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
4.3 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales & Forecasts
4.3.1 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales, 2020-2025
4.3.2 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales, 2026-2031
4.3.3 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
4.4 Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Price (Manufacturers Selling Prices), 2020-2031
5 Sights by Application
5.1 Overview
5.1.1 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Market Size, 2024 & 2031
5.1.2 300 mm Wafer
5.1.3 200 mm Wafer
5.1.4 Others
5.2 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue & Forecasts
5.2.1 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2025
5.2.2 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue, 2026-2031
5.2.3 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
5.3 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales & Forecasts
5.3.1 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales, 2020-2025
5.3.2 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales, 2026-2031
5.3.3 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
5.4 Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Price (Manufacturers Selling Prices), 2020-2031
6 Sights by Region
6.1 By Region – Global Semiconductor Wafer Dry Etching Equipment Market Size, 2024 & 2031
6.2 By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue & Forecasts
6.2.1 By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2025
6.2.2 By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue, 2026-2031
6.2.3 By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
6.3 By Region – Global Semiconductor Wafer Dry Etching Equipment Sales & Forecasts
6.3.1 By Region – Global Semiconductor Wafer Dry Etching Equipment Sales, 2020-2025
6.3.2 By Region – Global Semiconductor Wafer Dry Etching Equipment Sales, 2026-2031
6.3.3 By Region – Global Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
6.4 North America
6.4.1 By Country – North America Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2031
6.4.2 By Country – North America Semiconductor Wafer Dry Etching Equipment Sales, 2020-2031
6.4.3 United States Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.4.4 Canada Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.4.5 Mexico Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5 Europe
6.5.1 By Country – Europe Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2031
6.5.2 By Country – Europe Semiconductor Wafer Dry Etching Equipment Sales, 2020-2031
6.5.3 Germany Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5.4 France Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5.5 U.K. Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5.6 Italy Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5.7 Russia Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5.8 Nordic Countries Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.5.9 Benelux Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.6 Asia
6.6.1 By Region – Asia Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2031
6.6.2 By Region – Asia Semiconductor Wafer Dry Etching Equipment Sales, 2020-2031
6.6.3 China Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.6.4 Japan Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.6.5 South Korea Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.6.6 Southeast Asia Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.6.7 India Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.7 South America
6.7.1 By Country – South America Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2031
6.7.2 By Country – South America Semiconductor Wafer Dry Etching Equipment Sales, 2020-2031
6.7.3 Brazil Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.7.4 Argentina Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.8 Middle East & Africa
6.8.1 By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Revenue, 2020-2031
6.8.2 By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Sales, 2020-2031
6.8.3 Turkey Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.8.4 Israel Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.8.5 Saudi Arabia Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
6.8.6 UAE Semiconductor Wafer Dry Etching Equipment Market Size, 2020-2031
7 Manufacturers & Brands Profiles
7.1 Lam Research
7.1.1 Lam Research Company Summary
7.1.2 Lam Research Business Overview
7.1.3 Lam Research Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.1.4 Lam Research Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.1.5 Lam Research Key News & Latest Developments
7.2 Tokyo Electron Limited
7.2.1 Tokyo Electron Limited Company Summary
7.2.2 Tokyo Electron Limited Business Overview
7.2.3 Tokyo Electron Limited Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.2.4 Tokyo Electron Limited Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.2.5 Tokyo Electron Limited Key News & Latest Developments
7.3 Applied Materials
7.3.1 Applied Materials Company Summary
7.3.2 Applied Materials Business Overview
7.3.3 Applied Materials Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.3.4 Applied Materials Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.3.5 Applied Materials Key News & Latest Developments
7.4 Hitachi High-Tech
7.4.1 Hitachi High-Tech Company Summary
7.4.2 Hitachi High-Tech Business Overview
7.4.3 Hitachi High-Tech Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.4.4 Hitachi High-Tech Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.4.5 Hitachi High-Tech Key News & Latest Developments
7.5 SEMES
7.5.1 SEMES Company Summary
7.5.2 SEMES Business Overview
7.5.3 SEMES Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.5.4 SEMES Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.5.5 SEMES Key News & Latest Developments
7.6 AMEC
7.6.1 AMEC Company Summary
7.6.2 AMEC Business Overview
7.6.3 AMEC Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.6.4 AMEC Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.6.5 AMEC Key News & Latest Developments
7.7 NAURA
7.7.1 NAURA Company Summary
7.7.2 NAURA Business Overview
7.7.3 NAURA Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.7.4 NAURA Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.7.5 NAURA Key News & Latest Developments
7.8 SPTS Technologies (KLA)
7.8.1 SPTS Technologies (KLA) Company Summary
7.8.2 SPTS Technologies (KLA) Business Overview
7.8.3 SPTS Technologies (KLA) Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.8.4 SPTS Technologies (KLA) Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.8.5 SPTS Technologies (KLA) Key News & Latest Developments
7.9 Oxford Instruments
7.9.1 Oxford Instruments Company Summary
7.9.2 Oxford Instruments Business Overview
7.9.3 Oxford Instruments Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.9.4 Oxford Instruments Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.9.5 Oxford Instruments Key News & Latest Developments
7.10 ULVAC
7.10.1 ULVAC Company Summary
7.10.2 ULVAC Business Overview
7.10.3 ULVAC Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.10.4 ULVAC Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.10.5 ULVAC Key News & Latest Developments
7.11 Plasma-Therm
7.11.1 Plasma-Therm Company Summary
7.11.2 Plasma-Therm Business Overview
7.11.3 Plasma-Therm Semiconductor Wafer Dry Etching Equipment Major Product Offerings
7.11.4 Plasma-Therm Semiconductor Wafer Dry Etching Equipment Sales and Revenue in Global (2020-2025)
7.11.5 Plasma-Therm Key News & Latest Developments
8 Global Semiconductor Wafer Dry Etching Equipment Production Capacity, Analysis
8.1 Global Semiconductor Wafer Dry Etching Equipment Production Capacity, 2020-2031
8.2 Semiconductor Wafer Dry Etching Equipment Production Capacity of Key Manufacturers in Global Market
8.3 Global Semiconductor Wafer Dry Etching Equipment Production by Region
9 Key Market Trends, Opportunity, Drivers and Restraints
9.1 Market Opportunities & Trends
9.2 Market Drivers
9.3 Market Restraints
10 Semiconductor Wafer Dry Etching Equipment Supply Chain Analysis
10.1 Semiconductor Wafer Dry Etching Equipment Industry Value Chain
10.2 Semiconductor Wafer Dry Etching Equipment Upstream Market
10.3 Semiconductor Wafer Dry Etching Equipment Downstream and Clients
10.4 Marketing Channels Analysis
10.4.1 Marketing Channels
10.4.2 Semiconductor Wafer Dry Etching Equipment Distributors and Sales Agents in Global
11 Conclusion
12 Appendix
12.1 Note
12.2 Examples of Clients
12.3 DisclaimerList of Tables
Table 1. Key Players of Semiconductor Wafer Dry Etching Equipment in Global Market
Table 2. Top Semiconductor Wafer Dry Etching Equipment Players in Global Market, Ranking by Revenue (2024)
Table 3. Global Semiconductor Wafer Dry Etching Equipment Revenue by Companies, (US$, Mn), 2020-2025
Table 4. Global Semiconductor Wafer Dry Etching Equipment Revenue Share by Companies, 2020-2025
Table 5. Global Semiconductor Wafer Dry Etching Equipment Sales by Companies, (Units), 2020-2025
Table 6. Global Semiconductor Wafer Dry Etching Equipment Sales Share by Companies, 2020-2025
Table 7. Key Manufacturers Semiconductor Wafer Dry Etching Equipment Price (2020-2025) & (US$/Unit)
Table 8. Global Manufacturers Semiconductor Wafer Dry Etching Equipment Product Type
Table 9. List of Global Tier 1 Semiconductor Wafer Dry Etching Equipment Companies, Revenue (US$, Mn) in 2024 and Market Share
Table 10. List of Global Tier 2 and Tier 3 Semiconductor Wafer Dry Etching Equipment Companies, Revenue (US$, Mn) in 2024 and Market Share
Table 11. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2024 & 2031
Table 12. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue (US$, Mn), 2020-2025
Table 13. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue (US$, Mn), 2026-2031
Table 14. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales (Units), 2020-2025
Table 15. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales (Units), 2026-2031
Table 16. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2024 & 2031
Table 17. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 18. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 19. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 20. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 21. By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2025-2031
Table 22. By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 23. By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 24. By Region – Global Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 25. By Region – Global Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 26. By Country – North America Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 27. By Country – North America Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 28. By Country – North America Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 29. By Country – North America Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 30. By Country – Europe Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 31. By Country – Europe Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 32. By Country – Europe Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 33. By Country – Europe Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 34. By Region – Asia Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 35. By Region – Asia Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 36. By Region – Asia Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 37. By Region – Asia Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 38. By Country – South America Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 39. By Country – South America Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 40. By Country – South America Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 41. By Country – South America Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 42. By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2025
Table 43. By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2026-2031
Table 44. By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2020-2025
Table 45. By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Sales, (Units), 2026-2031
Table 46. Lam Research Company Summary
Table 47. Lam Research Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 48. Lam Research Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 49. Lam Research Key News & Latest Developments
Table 50. Tokyo Electron Limited Company Summary
Table 51. Tokyo Electron Limited Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 52. Tokyo Electron Limited Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 53. Tokyo Electron Limited Key News & Latest Developments
Table 54. Applied Materials Company Summary
Table 55. Applied Materials Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 56. Applied Materials Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 57. Applied Materials Key News & Latest Developments
Table 58. Hitachi High-Tech Company Summary
Table 59. Hitachi High-Tech Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 60. Hitachi High-Tech Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 61. Hitachi High-Tech Key News & Latest Developments
Table 62. SEMES Company Summary
Table 63. SEMES Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 64. SEMES Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 65. SEMES Key News & Latest Developments
Table 66. AMEC Company Summary
Table 67. AMEC Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 68. AMEC Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 69. AMEC Key News & Latest Developments
Table 70. NAURA Company Summary
Table 71. NAURA Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 72. NAURA Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 73. NAURA Key News & Latest Developments
Table 74. SPTS Technologies (KLA) Company Summary
Table 75. SPTS Technologies (KLA) Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 76. SPTS Technologies (KLA) Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 77. SPTS Technologies (KLA) Key News & Latest Developments
Table 78. Oxford Instruments Company Summary
Table 79. Oxford Instruments Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 80. Oxford Instruments Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 81. Oxford Instruments Key News & Latest Developments
Table 82. ULVAC Company Summary
Table 83. ULVAC Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 84. ULVAC Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 85. ULVAC Key News & Latest Developments
Table 86. Plasma-Therm Company Summary
Table 87. Plasma-Therm Semiconductor Wafer Dry Etching Equipment Product Offerings
Table 88. Plasma-Therm Semiconductor Wafer Dry Etching Equipment Sales (Units), Revenue (US$, Mn) and Average Price (US$/Unit) & (2020-2025)
Table 89. Plasma-Therm Key News & Latest Developments
Table 90. Semiconductor Wafer Dry Etching Equipment Capacity of Key Manufacturers in Global Market, 2023-2025 (Units)
Table 91. Global Semiconductor Wafer Dry Etching Equipment Capacity Market Share of Key Manufacturers, 2023-2025
Table 92. Global Semiconductor Wafer Dry Etching Equipment Production by Region, 2020-2025 (Units)
Table 93. Global Semiconductor Wafer Dry Etching Equipment Production by Region, 2026-2031 (Units)
Table 94. Semiconductor Wafer Dry Etching Equipment Market Opportunities & Trends in Global Market
Table 95. Semiconductor Wafer Dry Etching Equipment Market Drivers in Global Market
Table 96. Semiconductor Wafer Dry Etching Equipment Market Restraints in Global Market
Table 97. Semiconductor Wafer Dry Etching Equipment Raw Materials
Table 98. Semiconductor Wafer Dry Etching Equipment Raw Materials Suppliers in Global Market
Table 99. Typical Semiconductor Wafer Dry Etching Equipment Downstream
Table 100. Semiconductor Wafer Dry Etching Equipment Downstream Clients in Global Market
Table 101. Semiconductor Wafer Dry Etching Equipment Distributors and Sales Agents in Global Market

List of Figures
Figure 1. Semiconductor Wafer Dry Etching Equipment Product Picture
Figure 2. Semiconductor Wafer Dry Etching Equipment Segment by Type in 2024
Figure 3. Semiconductor Wafer Dry Etching Equipment Segment by Application in 2024
Figure 4. Global Semiconductor Wafer Dry Etching Equipment Market Overview: 2024
Figure 5. Key Caveats
Figure 6. Global Semiconductor Wafer Dry Etching Equipment Market Size: 2024 VS 2031 (US$, Mn)
Figure 7. Global Semiconductor Wafer Dry Etching Equipment Revenue: 2020-2031 (US$, Mn)
Figure 8. Semiconductor Wafer Dry Etching Equipment Sales in Global Market: 2020-2031 (Units)
Figure 9. The Top 3 and 5 Players Market Share by Semiconductor Wafer Dry Etching Equipment Revenue in 2024
Figure 10. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2024 & 2031
Figure 11. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 12. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
Figure 13. Segment by Type – Global Semiconductor Wafer Dry Etching Equipment Price (US$/Unit), 2020-2031
Figure 14. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2024 & 2031
Figure 15. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 16. Segment by Application – Global Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
Figure 17. Segment by Application -Global Semiconductor Wafer Dry Etching Equipment Price (US$/Unit), 2020-2031
Figure 18. By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2025 & 2031
Figure 19. By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020 VS 2024 VS 2031
Figure 20. By Region – Global Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 21. By Region – Global Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
Figure 22. By Country – North America Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 23. By Country – North America Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
Figure 24. United States Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 25. Canada Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 26. Mexico Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 27. By Country – Europe Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 28. By Country – Europe Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
Figure 29. Germany Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 30. France Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 31. U.K. Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 32. Italy Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 33. Russia Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 34. Nordic Countries Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 35. Benelux Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 36. By Region – Asia Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 37. By Region – Asia Semiconductor Wafer Dry Etching Equipment Sales Market Share, 2020-2031
Figure 38. China Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 39. Japan Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 40. South Korea Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 41. Southeast Asia Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 42. India Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 43. By Country – South America Semiconductor Wafer Dry Etching Equipment Revenue Market Share, 2020-2031
Figure 44. By Country – South America Semiconductor Wafer Dry Etching Equipment Sales, Market Share, 2020-2031
Figure 45. Brazil Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 46. Argentina Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 47. By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Revenue, Market Share, 2020-2031
Figure 48. By Country – Middle East & Africa Semiconductor Wafer Dry Etching Equipment Sales, Market Share, 2020-2031
Figure 49. Turkey Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 50. Israel Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 51. Saudi Arabia Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 52. UAE Semiconductor Wafer Dry Etching Equipment Revenue, (US$, Mn), 2020-2031
Figure 53. Global Semiconductor Wafer Dry Etching Equipment Production Capacity (Units), 2020-2031
Figure 54. The Percentage of Production Semiconductor Wafer Dry Etching Equipment by Region, 2024 VS 2031
Figure 55. Semiconductor Wafer Dry Etching Equipment Industry Value Chain
Figure 56. Marketing Channels

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